Thermolysis of Polymethacrylates for 193 nm Resist
نویسندگان
چکیده
منابع مشابه
Dissolution behavior of chemically amplified resist polymers for 248-, 193-, and 157-nm lithography
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2006
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.19.705